1
Motorola Sensor Device Data
200 kPa
On-Chip Temperature
Compensated & Calibrated
Pressure Sensors
The MPX2200 and MPX2201 series device is a silicon piezoresistive pressure sensor
providing a highly accurate and linear voltage output -- directly proportional to the
applied pressure. The sensor is a single monolithic silicon diaphragm with the strain
gauge and a thinfilm resistor network integrated onchip. The chip is laser trimmed for
precise span and offset calibration and temperature compensation. They are designed
for use in applications such as pump/motor controllers, robotics, level indicators, medical
diagnostics, pressure switching, barometers, altimeters, etc.
Features
Temperature Compensated Over 0
C to + 85
C
Patented Silicon Shear Stress Strain Gauge
0.25% Linearity (MPX2200D)
Easy to Use Chip Carrier Package
Available in Absolute, Differential and Gauge Configurations
Application Examples
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Figure 1 illustrates a block diagram of the internal circuitry on the standalone
pressure sensor chip.
Figure 1. Temperature Compensated Pressure Sensor Schematic
VS
3
Xducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2
4
Vout+
Vout
1
GND
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the Xducer is directly proportional to the differential
pressure applied.
The absolute sensor has a builtin reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred devices are Motorola recommended choices for future use and best overall value.
Senseon and Xducer are trademarks of Motorola, Inc.
Order this document
by MPX2200/D
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Motorola, Inc. 1997
BASIC CHIP
CARRIER ELEMENT
CASE 34415, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 344C01, STYLE 1
MPX2200
MPX2201
SERIES
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
NOTE: Pin 1 is the notched pin.
PIN NUMBER
1
2
Gnd
+Vout
3
4
VS
Vout
Motorola Preferred Device
REV 7
MPX2200 MPX2201 SERIES
2
Motorola Sensor Device Data
MAXIMUM RATINGS
Rating
Symbol
Value
Unit
Overpressure(8) (P1 > P2)
Pmax
400
kPa
Burst Pressure(8) (P1 > P2)
Pburst
2000
kPa
Storage Temperature
Tstg
40 to +125
C
Operating Temperature
TA
40 to +125
C
OPERATING CHARACTERISTICS
(VS = 10 Vdc, TA = 25
C unless otherwise noted, P1 > P2)
Characteristics
Symbol
Min
Typ
Max
Unit
Pressure Range(1)
POP
0
--
200
kPa
Supply Voltage
VS
--
10
16
Vdc
Supply Current
Io
--
6.0
--
mAdc
Full Scale Span(3)
MPX2200A, MPX2200D, MPX2201D
MPX2201A
VFSS
38.5
37.5
40
40
41.5
42.5
mV
Offset(4)
MPX2200A, MPX2200D
MPX2200A
MPX2201A
Voff
1.0
2.0
3.0
--
--
--
1.0
2.0
3.0
mV
Sensitivity
V/
P
--
0.2
--
mV/kPa
Linearity(5)
MPX2200D
MPX2200A
MPX2201D
MPX2201A
--
0.25
1.0
0.5
2.0
--
--
--
--
0.25
1.0
0.5
2.0
%VFSS
Pressure Hysteresis(5) (0 to 200 kPa)
--
--
0.1
--
%VFSS
Temperature Hysteresis(5) ( 40
C to +125
C)
--
--
0.5
--
%VFSS
Temperature Effect on Full Scale Span(5)
TCVFSS
1.0
--
1.0
%VFSS
Temperature Effect on Offset(5)
TCVoff
1.0
--
1.0
mV
Input Impedance
Zin
1300
--
2500
Output Impedance
Zout
1400
--
3000
Response Time(6) (10% to 90%)
tR
--
1.0
--
ms
WarmUp
--
--
20
--
ms
Offset Stability(9)
--
--
0.5
--
%VFSS
MECHANICAL CHARACTERISTICS
Characteristics
Symbol
Min
Typ
Max
Unit
Weight, (Basic Element Case 34415)
--
--
2.0
--
Grams
Common Mode Line Pressure(7)
--
--
--
690
kPa
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device selfheating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25
C.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85
C, relative to 25
C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85
C, relative
to 25
C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the casetolead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPX2200 MPX2201 SERIES
3
Motorola Sensor Device Data
LINEARITY
Linearity refers to how well a transducer's output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the "best case" linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the "worst case" error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola's
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange
pressure.
Figure 2. Linearity Specification Comparison
LEAST
SQUARE
DEVIATION
RELA
TIVE VOL
T
AGE OUTPUT
PRESSURE (% FULLSCALE)
0
50
100
END POINT
STRAIGHT LINE FIT
EXAGGERATED
PERFORMANCE
CURVE
LEAST SQUARES FIT
STRAIGHT LINE
DEVIATION
OFFSET
ONCHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX2200
series at 25
C. The output is directly proportional to the dif-
ferential pressure and is essentially a straight line.
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteristics.
Figure 3. Output versus Pressure Differential
Figure 4. CrossSectional Diagrams (Not to Scale)
40
35
30
25
20
15
10
5
0
5
0
50
7.25
100
14.5
150
21.75
200
29
PRESSURE
OUTPUT
(mVdc)
SPAN
RANGE
(TYP)
OFFSET
kPa
PSI
VS = 10 Vdc
TA = 25
C
P1 > P2
25
75
125
175
MAX
TYP
MIN
SILICONE GEL
DIE COAT
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE
DIE
STAINLESS STEEL
METAL COVER
EPOXY
CASE
DIFFERENTIAL/GAUGE ELEMENT
DIE
BOND
SILICONE GEL
DIE COAT
WIRE BOND
LEAD FRAME
ABSOLUTE
DIE
STAINLESS STEEL
METAL COVER
EPOXY
CASE
DIE
BOND
ABSOLUTE ELEMENT
P1
P2
P1
P2
Figure 4 illustrates an absolute sensing die (right) and the
differential or gauge die in the basic chip carrier (Case
34415). A silicone gel isolates the die surface and wire
bonds from the environment, while allowing the pressure sig-
nal to be transmitted to the silicon diaphragm.
The MPX2200 series pressure sensor operating charac-
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
MPX2200 MPX2201 SERIES
4
Motorola Sensor Device Data
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
or gauge sensor is designed to operate with positive differen-
tial pressure applied, P1 > P2. The absolute sensor is de-
signed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Part Number
Case Type
Pressure (P1) Side Identifier
MPX2200A
MPX2200D
34415
Stainless Steel Cap
MPX2200DP
MPX2201DP
344C01
Side with Part Marking
MPX2200AP
MPX2200GP
MPX2201GP
344B01
Side with Port Attached
MPX2200GVP
344D01
Stainless Steel Cap
MPX2200AS
MPX2200GS
344E01
Side with Port Attached
MPX2200GVS
344A01
Stainless Steel Cap
MPX2200ASX
MPX2200GSX
MPX2201GSX
344F01
Side with Port Attached
ORDERING INFORMATION
MPX2200 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
D
i
T
O
i
C
T
MPX Series
Device Type
Options
Case Type
Order Number
Device Marking
Basic Element
Absolute, Differential
Case 34415
MPX2200A
MPX2200D
MPX2200A
MPX2200D
Ported Elements
Differential
Case 344C01
MPX2200DP
MPX2201DP
MPX2200DP
MPX2201DP
Absolute, Gauge
Case 344B01
MPX2200AP
MPX2200GP
MPX2201GP
MPX2200AP
MPX2200GP
MPX2201GP
Gauge Vacuum
Case 344D01
MPX2200GVP
MPX2200GVP
Absolute, Gauge Stove Pipe
Case 344E01
MPX2200AS
MPX2200GS
MPX2200A
MPX2200D
Gauge Vacuum Stove Pipe
Case 344A01
MPX2200GVS
MPX2200D
Absolute, Gauge Axial
Case 344F01
MPX2200ASX
MPX2200GSX
MPX2201GSX
MPX2200A
MPX2200D
MPX2201D
MPX2200 MPX2201 SERIES
5
Motorola Sensor Device Data
PACKAGE DIMENSIONS
CASE 34415
ISSUE W
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. OUTPUT
M
A
M
0.136 (0.005)
T
1
2
3
4
PIN 1
R
N
L
G
F
D
4 PL
SEATING
PLANE
T
C
M
J
B
A
DIM
MIN
MAX
MIN
MAX
MILLIMETERS
INCHES
A
0.595
0.630
15.11
16.00
B
0.514
0.534
13.06
13.56
C
0.200
0.220
5.08
5.59
D
0.016
0.020
0.41
0.51
F
0.048
0.064
1.22
1.63
G
0.100 BSC
2.54 BSC
J
0.014
0.016
0.36
0.40
L
0.695
0.725
17.65
18.42
M
30 NOM
30 NOM
N
0.475
0.495
12.07
12.57
R
0.430
0.450
10.92
11.43
_
_
NOTES:
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION A IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
POSITIVE
PRESSURE (P1)
POSITIVE
PRESSURE
(P1)
CASE 344A01
ISSUE B
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5M, 1982.
2. CONTROLLING DIMENSION: INCH.
STYLE 1:
PIN 1. GROUND
2. + OUTPUT
3. + SUPPLY
4. OUTPUT
POSITIVE
PRESSURE
PIN 1
4 PL
PORT #2
VACUUM
PRESSURE
1
SEATING
PLANE
2
3 4
K
A
S
G
F
D
M
B
M
0.13 (0.005)
T
C
N
R
V
J
B
T
DIM
MIN
MAX
MIN
MAX
MILLIMETERS
INCHES
A
0.690
0.720
17.53
18.28
B
0.245
0.255
6.22
6.48
C
0.780
0.820
19.81
20.82
D
0.016
0.020
0.41
0.51
F
0.048
0.064
1.22
1.63
G
0.100 BSC
2.54 BSC
J
0.014
0.016
0.36
0.41
K
0.345
0.375
8.76
9.53
N
0.300
0.310
7.62
7.87
R
0.178
0.186
4.52
4.72
S
V
0.182
0.194
4.62
4.93
0.220
0.240
5.59
6.10
(P1)
(P2)
PDF 
ZIP